Micro and nano dual-scale structures fabricated by amplitude modulation in multi-beam laser interference lithography
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Optics Express
سال: 2017
ISSN: 1094-4087
DOI: 10.1364/oe.25.029135